基于压力 - 位置 / 速度反馈的石英坩埚切割工艺特性研究

健 景(浙江美晶新材料股份有限公司，中国)
连仲 李(浙江美晶新材料股份有限公司，中国)
炯杰 管(浙江美晶新材料股份有限公司，中国)
超 陈(浙江美晶新材料股份有限公司，中国)

摘要

石英坩埚是制造半导体单晶硅的关键容器，尺寸规格分布在16到37英寸。目前石英坩埚制成后需要使用金刚石切割片进行端面切割和倒棱作业，获取目标高度和规定的端口形貌尺寸。因石英坩埚熔制成型一般采用高温电弧法，坩埚轮廓尺寸在±3mm范围内波动，导致金刚石砂轮切割设备在切割过程中存在边料提前崩断、端口微裂纹、返工修磨等问题，影响产品品质及生产合格率。针对此问题，提出采用切割压力-位置/速度反馈补偿控制的方法，通过实时采集切割压力，去噪后与理论计算压力进行反馈对比，并通过对位置/速度的动态补偿调节，实现坩埚圆周方向切割深度的均匀性，减小切割过程中的压力波动，降低边料提前崩断概率，提高坩埚品质。通过理论分析和试验研究，与常规切割倒角方式比，新的工艺算法可以有效改善切割崩边问题，切割过程中的压力波动减小30%，提前崩断比例降低10%，切割良率显著提升。

关键词

石英坩埚；切割倒棱；切割良率；压力反馈

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DOI: http://dx.doi.org/10.12345/hgyjxjz.v4i4.38234